Ceramic Targets and Substrates
MSI’s Wet and Dry Chemical Processes allow us to meet our
customer’s ceramic target specifications. We work together with our customers to
produce their ceramic targets to the highest quality standards in the most cost
effective manner. Our advanced bonding process allows us to bond the ceramic
targets to almost any backing plates up to 100"long x 20"wide. This includes our
state-of-the-art Plasma Sprayed process which is capable of meeting our
Customer’s Rotatable Target requirements. MSI also offer single crystal
substrates for our customers to produce their high quality thin films such as Al2O3,
LaAlO3, MgF2, MgO, SrTiO3,
YAG, YSZ and others.
Metal Targets
MSI has established a world wide reputation for its experience in the design,
manufacture and service of high purity precious, semi and non precious metal
targets and coater components since 1981. Our sputtering and evaporation
materials are used in a multitude of thin film coating industrial applications
in the aerospace, automotive, decorative, optical, electronic and photovoltaic
solar panel display.
Our Planar Targets are designed and manufactured carefully to avoid the
introduction of raw material surface contaminants to the thin film coating
process, machined to meet customer’s specifications. Our target products are
available in segmented planar, monolithic planar and rotatable styles. They may
be cast, plasma sprayed or bonded. Our capability to manufacture those targets
make us very competitive to other Sputtering Businesses in the world. We can
achieve the superior material utilization and lot to lot stability. Our
state-of-the-art internal process controls ensure the proper grain size with
minimal alloy gradient, regardless of target sizes.
Metals and Metal-Alloy Styles
| Materials |
Forms |
Applications |
|
Aluminum & Al Alloys |
Planar Clamp and Bolt Down
Annular, and Rotatable |
Optical including Low-e Glass
IC and PV Solar Cells |
|
Chromium |
Planar Clamp and Bolt Down
Annular |
Optical including Low-e Glass
Printer Heads |
|
Copper |
Planar Clamp and Bolt Down
Annular |
Optical including Low-e Glass
Decorative Hardware, Backing
Plates |
|
Indium, Tin and
Indium - Tin Alloys |
Rotatable
Boat |
Optical including Low-e Glass
Aircraft Canopies, LCD and
PV Solar Cells |
|
Molybdenum |
Planar Clamp and Bolt Down
Annular |
Optical Coating and IC |
|
Niobium/Columbium |
Planar Clamp and Bolt Down
Annular |
Optical Coating and IC |
|
Nickel and Nickel Alloys |
Planar Clamp and Bolt Down
Annular |
Optical including Low-e Glass
Back side of chip coat |
|
Silver |
Planar Clamp and Bolt Down
Annular |
Optical including Low-e Glass |
|
Stainless Steel |
Planar Clamp and Bolt Down
Cylinder |
Optical including Low-e Glass
Backing Plate |
|
Tantalum |
Planar Clamp and Bolt Down
Annular |
Decorative including Flat Panel
Display and IC |
|
Titanium and Ti/Al
Alloys |
Planar Clamp and Bolt Down
Rotatable, Monolithic |
Optical including Low-e Glass
Wear Coat |
|
Zinc and Zinc Alloys |
Planar Clamp and Bolt Down
including Monolithic and
Rotatable |
Optical including Low-e Glass
PV Solar Cell |
|
Tungsten (Wolfram) |
Planar Clamp and Bolt Down
Annular |
Electronic Devices, IC |
|
Zirconium |
Planar Clamp and Bolt Down
Annular |
Decorative Hardware |
©2008
Materials Science International, Inc. 1660 Georgesville Road, Columbus, Ohio
43228-3620, U.S.A. |